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Mandatory Greenhouse Gas Reporting 

---
identifier: "/us/fr/2015-05549"
source: "fr"
legal_status: "authoritative_unofficial"
title: "Mandatory Greenhouse Gas Reporting"
title_number: 0
title_name: "Federal Register"
section_number: "2015-05549"
section_name: "Mandatory Greenhouse Gas Reporting"
positive_law: false
currency: "2015-03-12"
last_updated: "2015-03-12"
format_version: "1.1.0"
generator: "[email protected]"
agency: "Environmental Protection Agency"
document_number: "2015-05549"
document_type: "rule"
publication_date: "2015-03-12"
agencies:
  - "Environmental Protection Agency"
cfr_references:
  - "40 CFR Part 98"
fr_citation: "80 FR 12934"
fr_volume: 80
---

#  Mandatory Greenhouse Gas Reporting

**CFR Correction**

In Title 40 of the Code of Federal Regulations, Parts 96 to 99, revised as of July 1, 2014, on pages 696 through 698, in subpart I of part 98, tables I-5 through I-7 are corrected to read as follows:

| Process type factors | Process gas i | CF | C
                            
                            F | CHF | CH
                            
                            F | C
                            
                            F | c− C
                            
                            F | NF | NF | SF | C
                            
                            F | C
                            
                            F | C
                            
                            F
                            
                            O |
| --- | --- | --- | --- | --- | --- | --- | --- | --- | --- | --- | --- | --- | --- |
| Etch 1-U | 0.7 | 0.4 | 0.4 | 0.06 | NA | 0.2 | NA | 0.2 | 0.2 | 0.1 | 0.2 | NA |  |
| Etch BCF | NA | 0.4 | 0.07 | 0.08 | NA | 0.2 | NA | NA | NA | 0.3 | 0.2 | NA |  |
| Etch BC
                            
                            F | NA | NA | NA | NA | NA | 0.2 | NA | NA | NA | 0.2 | 0.2 | NA |  |
| CVD Chamber Cleaning 1-U | 0.9 | 0.6 | NA | NA | 0.4 | 0.1 | 0.02 | 0.2 | NA | NA | 0.1 | 0.1 |  |
| CVD Chamber Cleaning BCF | NA | 0.1 | NA | NA | 0.1 | 0.1 | 0.02 | 0.1 | NA | NA | 0.1 | 0.1 |  |
| CVD Chamber Cleaning BC
                            
                            F | NA | NA | NA | NA | NA | NA | NA | NA | NA | NA | NA | 0.4 |  |

| Process type factors | Process gas i | CF | C
                            
                            F | CHF | CH
                            
                            F | C
                            
                            F | c− C
                            
                            F | NF | NF | SF |
| --- | --- | --- | --- | --- | --- | --- | --- | --- | --- | --- |
| Etch 1-U | 0.6 | NA | 0.2 | NA | NA | 0.1 | NA | NA | 0.3 |  |
| Etch BCF | NA | NA | 0.07 | NA | NA | 0.009 | NA | NA | NA |  |
| Etch BCHF | NA | NA | NA | NA | NA | 0.02 | NA | NA | NA |  |
| Etch BC
                            
                            F | NA | NA | 0.05 | NA | NA | NA | NA | NA | NA |  |
| CVD Chamber Cleaning 1-U | NA | NA | NA | NA | NA | NA | 0.03 | 0.3 | 0.9 |  |

| Process type factors | Process gas i | CF | C
                            
                            F | CHF | CH
                            
                            F | C
                            
                            F | c− C
                            
                            F | NF | NF | SF |
| --- | --- | --- | --- | --- | --- | --- | --- | --- | --- | --- |
| Etch 1-U | 0.7 | 0.4 | 0.4 | NA | NA | 0.2 | NA | NA | 0.4 |  |
| Etch BCF | NA | 0.2 | NA | NA | NA | 0.1 | NA | NA | NA |  |
| Etch BC
                            
                            F | NA | NA | NA | NA | NA | 0.1 | NA | NA | NA |  |
| CVD Chamber Cleaning 1-U | NA | 0.6 | NA | NA | 0.1 | 0.1 | NA | 0.3 | 0.4 |  |
| CVD Chamber Cleaning BCF | NA | 0.2 | NA | NA | 0.2 | 0.1 | NA | NA | NA |  |